เครื่องทำความร้อนอินฟราเรดสำหรับกำจัดก๊าซบนเวเฟอร์

Tue, 02 Jun 2026 03:59:19 +0800

Out on the fab floor, the photoresist bake isn’t just about hitting a temperature. It’s the thermal budget that sets your critical dimension control—period. When degas performance starts to drift, you know it right away: edge beads, footing, particle spikes that turn wafers into scrap. We built our wafer degas infrared heaters to take that uncertainty out of both soft bake and hard bake, shift after shift.
What matters, technically
We run short-wave infrared with fast response and direct energy transfer, so you get wafer-level thermal uniformity within ±0.1°C. The heater body is quartz and high-purity ceramic—built for Class 1–100 cleanroom use, with zero particle generation and low outgassing. Bake profiles stay repeatable because the control is closed-loop, and setpoints stay stable even on 7×24 duty cycles.
Here’s why it holds up in a real lithography cell: you’re running at full cadence, and downtime costs you in wafers per hour. These heaters keep the line moving with no unplanned stops, which translates into higher throughput and fewer scrap lots. Tighter control at the bake station improves overlay and CD uniformity, and the lower thermal inertia cuts energy use per lot. Long service intervals mean fewer hot-swaps—and less process risk.
A couple of practical notes. Installation needs precise optical alignment and a clean power feed; otherwise you risk hot spots and control noise. The heater performs best when the chamber geometry and gas flow match the beam profile—if they don’t, uniformity can drift, especially at the wafer edge. Plan a short commissioning run to lock the bake profile, then keep it locked. Once calibrated, the process stays stable.

ดีแกส on Your Quartz Heater Source

เครื่องทำความร้อนอินฟราเรดสำหรับกำจัดก๊าซบนเวเฟอร์